Strasbaugh nTellect 7AF - Page 225

Operations and Maintenance Manual Machine Setup
Version 1.2 - June 2004 9 - 13
EXAMPLE RECIPES
Example of a Coarse Grind Recipe
Step
1
Step
2
Step
3
Dwell Lift
Coarse
Wheel
RPM
1875
Thickness
683 673 667 10
revs.
673 µm
Feed Wafer
Thickness
800
Feed rate
8 2 1 @ 5 µm/sec.
Tape
Thickness
0
Chuck
Speed
150 150 150 150 150 RPM
Example of a Fine Grind Recipe
Step
1
Step
2
Step
3
Dwell Lift
Fine
Wheel
RPM
4000
Thickness
658 649 647 3
revs.
654 µm
Feed Wafer
Thickness
800
Feed rate
2 1.5 0.5 @ .05 µm/sec.
Tape
Thickness
0
Chuck
Speed
150 150 150 30 30 RPM