Operations and Maintenance Manual Machine Setup
Version 1.2 - June 2004 9 - 15
Machine
Alarms
The Machine Alarms button is reserved for future development.
Help
Touch the Help button to display information on making
selections at the Wafer Recipes menu.
Keypad
Select a parameter you wish to change by touching its current
value.
Touch the numbers and decimal point buttons on the keypad to
enter a new parameter value.
Values are displayed as you enter them in the entry display box
located just above the Clear button.
ENTER
To confirm an entry shown in the entry display box and transfer
it to the parameter selected, replacing the previous value for that
parameter, touch the Enter button.
You must confirm a new value for a parameter before you can
change the value of another parameter. Otherwise, the previous
value is restored when you move to another cell.
Clear
If you have not yet touched the Enter button, you may cancel or
correct an entry shown in the entry display box by touching the
Clear button to delete the entry.
After clearing the entry display, repeat the entry as desired at the
keypad.
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