Strasbaugh nTellect 7AF - Page 238

Strasbaugh nTellect (Model 7AF) Wafer Grinder
9 - 26 Version 1.2 - June 2004
One chuck truing recipe is stored and used for both work chucks.
Example of a Work Chuck Dressing Recipe
Step 1 Step
2
Dwell Lift
Coarse Wheel
RPM
2500
Removal
40 10 30
revs.
20 µm
Feed rate
2 1 @ 2 µm/sec.
Chuck Speed
60 60 60 60 RPM
Example of a Work Chuck Truing Recipe
Step 1 Step
2
Dwell Lift
Coarse Wheel
RPM
2500
Removal
190 10 30
revs.
20 µm
Feed rate
2 1 @ 2 µm/sec.
Chuck Speed
60 60 60 60 RPM