Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 109
VII. ADJUST THE BED TO A POSITION PARALLEL TO THE ROBOT
Tools Required
• test wafer
BEFORE YOU BEGIN
Confirm that Vacuum Is ON
Follow the procedures found in the Operator Functions chapter of this manual.
Confirm that All Grinding Area Initial Adjustments Have Been Completed
Refer to the Grinding Area Initial Adjustments section, above in this chapter.
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