Operations and Maintenance Manual Mechanical Maintenance Procedures
Version 1.2 - June 2004 11 - 111
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e. Start Cycle Touch the "Start Cycle" button to grind the
work chucks.
f. Wait for the cycle to finish.
g. Quit Touch the "Quit" button to return to the Main
Menu.
4. At the Output Control/Input Status menu, turn vacuum ON to the robot end
effector:
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a. Machine Maint At the Main Menu screen, touch the "Machine
Maint" button to select the "Machine
Maintenance menu.
Displays:
Machine Maintenance menu
b. Inputs/
Outputs At the Machine Maintenance menu, touch the
"Inputs/Outputs" button to select the Output
Control/Input Status menu.
Displays: Output Control/Input Status menu
c. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
d. Vacuum ON/OFF Touch the "Vacuum ON/OFF" button until
Vacuum ON is displayed.
5. Manually hold a test wafer centered under the robot end effector until it takes
vacuum and is retained by the end effector.
6. Move the robot end effector to the left work chuck.
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