Strasbaugh nTellect (Model 7AF) Wafer Grinder
11 - 112 Version 1.2 - June 2004
a. Robot icon At the Output Control/Input Status menu, touch
the "Robot" icon to select the Robot drop down
menu.
b. Move To Touch the "Move To" button on the Robot drop
down menu to select it.
c. Left Work Chuck Touch the "Left Work Chuck" button on the
Move To drop down submenu to select it.
The robot should now move to the left work chuck.
7. Visually check the position of the wafer relative to the left work chuck:
GOAL: While still being supported by the robot end effector, the wafer
should be parallel to the left work chuck.
If the goal is not met (the wafer tilted in relation to the left work chuck), check
the wafer position at the right work chuck by following the procedures in Steps
8. and 9., immediately below.
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