Strasbaugh nTellect 7AF - Page 438

Strasbaugh nTellect (Model 7AF) Wafer Grinder
12 - 22 Version 1.2 - June 2004
SPIN/RINSE
STATION
Lid UP/DOWN
Spindle UP/DOWN
Wafer Dry ON/OFF
Wafer Rinse ON/OFF
Vacuum ON/OFF
Blowoff ON/OFF
Clean Wafer Cycle
Close
Touch the spin/rinse icon to display the
spin/rinse drop down menu, listing the button
selections shown below:
Touch to move the spin/rinse lid up or down.
Touch to move the spin/rinse spindle up or
down.
Note: The control computer confirms that the
lid is up before moving the spindle up.
Touch to turn wafer drying on or off.
Touch to turn wafer rinsing on or off.
Touch to turn vacuum on or off.
Touch to turn blowoff on or off.
Touch to activate the manual wafer cleaning test
cycle, used in maintenance procedures for
checking the function of the spin/rinse station.
Cycle sequence:
1. Operator touches the Clean Wafer Cycle
button.
2. Spin/rinse lid is raised.
3. Spindle is raised.
4. Operator manually places a test wafer,
centered, on the spin/rinse spindle.
5. Operator touches the Clean Wafer Cycle
button
again to start the test cycle.
Touch to close the drop down menu.