Operations and Maintenance Manual Software Calibration
Version 1.2 - June 2004 12 - 23
ROBOT
Vacuum ON/OFF
Close
Touch the robot icon to display the robot drop
down menu, listing the button selections shown
below:
WARNING! To avoid breakage of the
released wafer, manually grasp the wafer
before turning vacuum off to the robot.
Touch to turn vacuum on or off to the robot.
Touch to close the drop down menu.
LUBRICATOR
Touch the lubricator button to activate self-
lubrication for the railing systems.
SEND 1, SEND 2,
RECEIVE 1, RECEIVE
2 CASSETTE TURRETS
Touch the cassette turret icons to rotate the
cassette turrets 180°, presenting the wafer
cassettes either to the robot or to the operator.
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