Strasbaugh nTellect 7AF - Page 494

Strasbaugh nTellect (Model 7AF) Wafer Grinder
13 - 34 Version 1.2 - June 2004
VACUUM
LEFT/RIGHT GRIND CHAMBER SEAL VACUUM
Solenoid
No. Component Name
Location/
Drawing No. Setting Goals
6
12
Left Grind Chamber Seal
Vacuum
Right Grind Chamber Seal
Vacuum
Valves: Door 14
Panel
Drawing: 224038
not regulated
Procedure:
• None required.
LEFT/RIGHT WORK CHUCK VACUUM
Solenoid
No. Component Name
Location/
Drawing No. Setting Goals
21
25
Left Work Chuck Vacuum
Right Work Chuck Vacuum
Valves: Door 14
Panel
Drawing: 224038
not regulated
Procedure:
• None required.