Strasbaugh nTellect 7AF - Page 495

Operations and Maintenance Manual Pneumatic Adjustments
Version 1.2 - June 2004 13- 35
PRE-ALIGNER VACUUM
Solenoid
No. Component Name
Location/
Drawing No. Setting Goals
35 Pre-aligner
Valve: Door 7 Panel
Drawing: 224039
not regulated
Procedure:
• None required.
RINSE SPIN CHUCK VACUUM
Solenoid
No. Component Name
Location/
Drawing No. Setting Goals
29 Rinse Spin Chuck
Valve: Door 7 Panel
Drawing: 224039
not regulated
Procedure:
• None required.
ROBOT END EFFECTOR VACUUM
Solenoid
No. Component Name
Location/
Drawing No. Setting Goals
37 Robot End Effector
Regulator and
Gauge: Door 7 Panel
Drawing: 224039
not regulated
Procedure:
• None required.