Operations and Maintenance Manual Troubleshooting
Version 1.2 - June 2004 14 - 17
RIGHT CONDITION ARM
Cause: Right condition arm has not
moved into the commanded position.
Resolution:
• Check condition arm up/down position sensors.
• Check condition arm park/engage position sensors.
COOLANT
LEFT CHUCK COOLANT
Cause: Water flow to grind wafers <
minimum.
Resolution:
• Compare "Left chuck coolant gpm" variable in
machine set up variables against water flow.
• Increase wafer flow: Check water source. Open
needle valve.
RIGHT CHUCK COOLANT
Cause: Water flow to grind wafers <
minimum.
Resolution:
• Compare "Right chuck coolant gpm" variable in
machine set up variables against water flow.
• Increase wafer flow: Check water source. Open
needle valve.
COUNTERBALANCE
COUNTERBALANCE
Cause: Counterbalance not adjusted
properly.
Resolution: Consult factory for proper load cell
adjustment procedure.