Strasbaugh nTellect (Model 7AF) Wafer Grinder
14 - 18 Version 1.2 - June 2004
DOORS AND PANELS
OPERATOR DOOR OPEN
Cause: Operator panel door open; refer
to Chapter 3, Physical Description, in
this manual.
Resolution: Close door.
SERVICE PANELS OPEN
Cause: Service panel door open; refer to
Chapter 3, Physical Description, in this
manual.
Resolution: Close door.
EXHAUST—IMPORTANT SAFETY INFORMATION!
EXHAUST FAIL
Cause:
• A hazardous material leak has been
detected in the exhaust!
Resolution:
• Evacuate area and respond per
company's emergency response
program.
FORCE
COARSE FORCE LIMIT
Cause:
• Coarse grind wheel can not grind at
the programmed feedrate.
• Check wafers for proper orientation
in cassettes. Tape should be up.
Resolution:
• Compare "CZ max grind force lbs"
variable in machine setup variables
against normal grinding forces. If
"CZ max grind force lbs" > normal
grinding forces, dress coarse wheel.
• Orient wafers correctly. Dress coarse
wheel.
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