Operations and Maintenance Manual Troubleshooting
Version 1.2 - June 2004 14 - 19
FINE FORCE LIMIT
Cause:
• Fine grind wheel can not grind at the
programmed feedrate.
• Check wafers for proper orientation
in cassettes. Tape should be up.
Resolution:
• Compare "FZ max grind force lbs"
variable in machine setup variables
against normal grinding forces. If
"FZ max grind force lbs" > normal
grinding forces, dress coarse wheel.
• Orient wafers correctly. Dress fine
wheel.
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