Strasbaugh nTellect (Model 7AF) Wafer Grinder
14 - 20 Version 1.2 - June 2004
GRIND ABORT
GRIND ABORT: UNSAFE!
Cause:
• Low air pressure.
Resolution:
• Check left work chuck air supply; it
must be > 80 PSI.
• Check right work chuck air supply; it
must be > 80 PSI.
• Check coarse grind spindle air
supply; it must be > 71 PSI.
• Check fine grind spindle air supply; it
must be > 71 PSI.
• Low supply vacuum. • Check "Rt chuck min vac. " hg."
variable in machine set up variables.
• Check "Lt chuck min vac. " hg."
variable in machine set up variables.
• Check vacuum source.
Error will occur only if vacuum level
is < set point and the following
conditions exist:
• "START" button pressed in the Auto
"Grind" or "Dress" Cycle.
• Gray wafer icon illuminated on
operator screen indicating wafer in
place on either work chuck.
• Work chuck rotating.
• Low D.I. water flow. • Compare "Left chuck coolant gpm"
variable in machine set up variables
against water flow.
• Compare "Right chuck coolant gpm"
variable in machine set up variables
against water flow.
• Increase water flow from source or
adjust flow valve for the problem
area.
• Servo error.
• Attempting to grind with wheel or
chuck stopped.
• Open service panel.
• Check left and right work chuck
operation.
• Check recipe.
• Check servo operation.
• Close service panel.
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