Strasbaugh nTellect (Model 7AF) Wafer Grinder
14 - 24 Version 1.2 - June 2004
REFERENCE
BAD REFERENCE
Cause: Reference wafer too thick.
Resolution:
• Check input wafer thickness.
• Check probe operation.
• Compare "Reference Wafer" variable
in machine set up variables.
ROBOT COMMUNICATION
ROBOT COMMUNICATION
Cause: Low level fault on the robot
communication port.
Resolution: Shut down power and restart
the machine to provide a comprehensive
system reset for the hardware.
SERVICE PANEL: ABORT
SERVICE PANEL: ABORT
Cause:
• A service panel switch was opened,
causing a grind abort.
• Intermittent service panel interlock
switch.
Resolution:
• Close the opened service panel, clear
the machine of any wafers, and
restart the grind process.
• Check service panel interlock
switches.
• Adjust or replace defective service
panel interlock switch(es).
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