Strasbaugh Calibration Variables
9
Dry time is limited to 60 seconds. However version 6.05 allows adding 100
to this time as a flag to request raising the grind seal during spinning. The
intention is to prevent water being thrown off the wafer into the 7AF and,
especially, onto finished wafers in the receive cassettes.
Number: 45 Value: 0.0 Label: Spin Station Options
Two options are added in software version 5.04. It is possible to turn on an
air blower in the spin station lid. With a small plastic hose aimed at the
center of the spin chuck, this assists in drying the wafer. When the spin
station dries itself between wafers, the air can be aimed at the center of the
spin chuck if the lid is raised. Set this variable to 1 to raise the lid when the
spin station dries itself between wafers. Set this variable to 10 to use the air
blower. Set this variable to 11 for both of these options.
Number: 46 Value: 0.0 Label: RT Chuck Wafer Clean secs
This used to be called “LT Chuck wafer clean rpm” with default value 250.
At the end of grinding a wafer, the chuck would spin at this speed for 4
seconds to remove water and grind debris from the wafer and the chuck.
This changed in software version 5.06. It then told the number of seconds to
keep spinning each chuck after the end of the Lift step of the grind cycle.
With the D.I. water continuing to spray, and the chuck continuing to spin at
the rpm of the Lift step, this provides extra rinsing of the grind wheel and the
wafer. This changed again in version 5.08, where it set the rinse for the right
chuck only. Also see variables 42, 43, 44.
Time is limited to 60 seconds. The grind seal remains up during this time.
Number: 47 Value: 0.0 Label: Grind Seal Sensors 0=No
An optional hardware modification allows the software to sense whether the
rubber seals around the grind chambers are truly inflated or deflated.
Without this option, software remembers whether its most recent request
was inflate or deflate, and behaves accordingly. However, the software can
then be misled in case of a vacuum or air pressure failure. The sensors, if
installed, prevent that.
Without this option, variable 47 must be set to zero to allow operation of the
7AF. With the option installed, set variable 47 to 1. If the variable is
changed during operation of the 7AF, a fault message may appear, due to
software and hardware getting out of sync. If that happens, run each grind
seal through its inflate-deflate cycle in Machine Maintenance to clear the
fault.
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