Strasbaugh Calibration Variables
11
Number: 54 Value: 4.0 Label: CZ Dwell LBS
In the Dwell step of the coarse grind cycle, raise the wheel until the force is
less than this value.
Number: 55 Value: 6.0 Label: FZ Dwell LBS
In the Dwell step of the fine grind cycle, raise the wheel until the force is less
than this value.
Number: 56 Value: 10.0 Label: FZ Grind Force Hystr LBS
Hysteresis is used to prevent “noise” in the reading of the force value from
causing erratic actions. The approach of the grind wheel to the wafer ends
when the wheel touches the wafer. This is declared to be true when the force
is greater than the value in this variable. In the lift up from the wafer, the
wheel wear is calculated when the wheel no longer touches the wafer. This
is declared to be true when the force is less than the value in this variable.
Number: 57 Value: 50.0 Label: FZ Max Grind Force LBS
If the force of the fine wheel on the wafer exceeds this maximum, a warning
message appears on the screen and the descent of the fine wheel will be
stopped. When the force is reduced to less than this maximum, descent will
resume. If variable 74 (Fine Force Timeout) is not zero, and the force
exceeds the maximum for the number of seconds in variable 74, the grind
cycle will abort.
Number: 58 Value: 10.0 Label: CZ Grind Force Hystr LBS
Hysteresis is used to prevent “noise” in the reading of the force value from
causing erratic actions. The approach of the grind wheel to the wafer ends
when the wheel touches the wafer. This is declared to be true when the force
is greater than the value in this variable. In the lift up from the wafer, the
wheel wear is calculated when the wheel no longer touches the wafer. This
is declared to be true when the force is less than the value in this variable.
Number: 59 Value: 60.0 Label: CZ Max Grind Force LBS
If the force of the coarse wheel on the wafer exceeds this maximum, a
warning message appears on the screen and the descent of the coarse wheel
will be stopped. When the force is reduced to less than this maximum,
descent will resume. If variable 75 (Coarse Force Timeout) is not zero, and
the force exceeds the maximum for the number of seconds in variable 75, the
grind cycle will abort.
Number: 60 Value: 1.0 Label: Coarse Max Deceleration
Regardless of the feed rate in the grind recipe, do not allow the coarse wheel
to move faster than it would if decelerated to the target at this deceleration.
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