Operation and Maintenance Manual Model 7AF Wafer Grinder
12
Number: 61 Value: 0.2 Label: Fine Max Deceleration
Regardless of the feed rate in the grind recipe, do not allow the fine wheel to
move faster than it would if decelerated to the target at this deceleration.
Number: 62 Value: 250.0 Label: LT Chuck Condition rpm
During the first part of the condition chuck cycle, rotate at this speed.
Number: 63 Value: 8.0 Label: LT Chuck Condition secs
Duration of the first part of the condition chuck cycle.
Number: 64 Value: 250.0 Label: LT Chuck Rinse rpm
During the second part of the condition chuck cycle, rotate at this speed.
Number: 65 Value: 5.0 Label: LT Chuck Rinse secs
Duration of the second part of the condition chuck cycle.
Number: 66 Value: 0.0 Label: LT Offset +/- 10 micron
Systematic errors, such as grind shape, can lead to small differences in
average thickness in product from the right and left work chucks. To
compensate for these small differences, this offset can be set at up to +/-10
microns for the right and left work chucks. Positive values will have the
effect of making the wafers thicker and negative values will make the wafers
thinner. This feature should not be used in lieu of setting up the machine
properly.
Number: 67 Value: 0.0 Label: Exhaust,Drain,PSI Monitr
With software version 4.04 it became possible to detect an exhaust system
failure, which is important for customers who grind hazardous materials. A
customer-supplied low-current dry-contact switch is needed to sense the
exhaust failure. With that sensor in place, an exhaust failure will prevent
grinding, dressing, or truing, and will abort any of those operations if they
had already begun.
With software version 5.06 this kind of monitoring was extended to a drain
overflow and/or a PSI failure activating an emergency one-minute PSI
supply.
With this optional hardware installed, set variable 67 to
1 to activate the exhaust monitor
10 to activate the drain overflow monitor
100 to activate the reserve PSI monitor
or to a sum of these to monitor multiple conditions. Without the hardware,
the corresponding digit of variable 67 must be set to 0 to allow operation of
the 7AF.
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