7AF Version 2.01 Features
3/15/95 Ken Hill
Purpose
Software version 2.01 for the model 7AF is to fix one problem and change the dwell display.
Fine Wheel Dress Disk Thickness
If a Dress disk exceeding 2000 microns was used a "Reference Bad" fault was displayed. Version 2.01 allows a dressing disk up
to 4000 microns to be used.
Dwell Display
The dwell count was not displayed during the weight unload at the beginning of the dwell cycle. The count now displays during
the unload process. However, counts may be larger if a short dwell is requested. This is because the dwell step is not terminated
until the force is unloaded.
7AF Version 2.02 Features
6/12/95 Ken Hill
Purpose
Software version 2.02 for the model 7AF is release that incorporates many new features and fixes. The
primary new feature is that the machine can now be set for very thick media. The wider pitch and fewer
wafers that the cassettes for this media require are handled with machine variables. Robot macros must be
upgraded to version 2.03! Also FloPro flowcharts must be upgraded to an object file date of 6/9/95 or later.
A new graphic file, AUTO7AF.GRS, dated 3/15/95, must be used.
Using Thick Media
Provisions for very thick media have been added. Referencing performance has been improved for thicker
media. The machine variable for Reference Wafer (#50) is now used as the maximum wafer thickness that
can be used to reference the machine. Therefore, this must be set properly for the machine to reference
properly and catch errors. The cassettes needed for this media use a larger pitch and contain fewer wafers.
These parameters can be set in machine variables 80 and 81, respectively. A paper, "Setting Custom Wafer and
Cassette Dimensions" is available to fully describe this feature.
Water Interlocks for Manual Operation
Checks have been added to manual operations that could spray water into the machine. The state of several
valves are checked or changed when an operation is requested to prevent water being sprayed into the
machine.
Miscellaneous
Force grind warnings are now turned off upon entering the dwell step. The dwell step actually begins an
unloading process and prevents any additional force being applied.
The chuck rotation can now be reversed by changing a machine variable.
Water temperature is now displayed during grinding.
FloPro, June 12, 1995
This revision was installed on the lab machine on June 9, 1995. This revision was primarily to allow sending
cassette pitch and wafer count information to the robot. A bug was fixed that interacts with only the version
2.02 of the executable to cause the fine grind cycle to intermittently stall at the end of a grind. If fine
grinding, the clean cycle is not done after a coarse grind to save time.
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