Strasbaugh nTellect (Model 7AF) Wafer Grinder
TOC - 4 Version 1.2 - June 2004
CHAPTER 4 - MECHANICAL DESCRIPTION
Overview 3
Grinding Area 3
Bridge Assembly 3
Spindle Assemblies 4
Coarse/Fine Spindles 4
Left/Right Work Chucks 5
Air Bearing Spindles 5
Left/Right Digital Measurement Probes 6
Left/Right Conditioning Arms 6
Wafer Handling Area 7
Robot 7
Pre-Aligner 8
Spin-Rinse Station 9
Send 1, Send 2, Receive 1, Receive 2 Cassette Access Turret Assemblies 9
CHAPTER 5 - CONTROL SYSTEM DESCRIPTION
Control Computer 3
Servo Control 3
Servo Amplifier 5
I/O and Interface System 6
Robot and Controller, 7
Pre-Aligner, and Controller 7
Digital Measurement Probes 8
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