Strasbaugh nTellect (Model 7AF)Wafer Grinder
2 - 24 Version 1.2 - June 2004
CLEAN DRY AIR
The clean dry air supply [H], which supplies air to the pneumatic system and the air bearing
spindles, is connected via a 1/2-inch tube connector located at the lower rear of the machine.
The supply should be flexible tubing designed to accommodate the specified flow and pressure.
Notes:
The air supplied must be clean and dry.
The air supply to the spindle should be filtered to remove oil and water particles in excess of
one micron. Oil carryover at 21 ° C (39.8 ° F) should not exceed .01 mg/cubic meter.
The use of a freeze drier is recommended, with the pressure dew point not exceeding 7.2 ° C
(45 ° F).
Care should be taken to ensure that all air supply lines are thoroughly purged before
connection to the spindles.
Teflon tape must never be used on connections downstream of the filters.
Nitrogen may be substituted for clean dry air.
VACUUM
The vacuum connection to the machine will collect a significant amount of process water and
silicon particles through the vacuum line to the vacuum source. An isolated vacuum pump
with a self-contained drain system is available from Strasbaugh as a machine option. For use
with a facility vacuum supply, a wall-mountable vacuum/waste separator is also available.
With such a system, the unit drain may be connected to the industrial waste drain [A] and the
unit vacuum supply connected to the vacuum clean dry air [J].
The connections for left work chuck vacuum [E1], right work chuck vacuum [E2], and
robot vacuum [E3] are 1/2-inch tubes located at the lower rear of the machine.
A bulkhead fitting is provided to connect the system to facility plumbing. The plumbing
should be selected to provide the necessary flow and pressure for the machine.
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