Operations and Maintenance Manual Installation
Version 1.2 - June 2004 2 - 25
VACUUM CLEAN DRY AIR
The vacuum clean dry air supply [J] is used only with the Strasbaugh vacuum
system, which may be purchased with the machine.
The vacuum clean dry air supply [J] connection is a 1/4-inch tube inlet located at
the lower rear of the machine. The fitting is on the system side of the Strasbaugh
vacuum system.
DE-IONIZED WATER
De-Ionized water is used as coolant during grinding and as a wafer rinse at the spin-
rinse station. The DI water system is equipped with a temperature gauge. If
temperature-controlled DI water is desired, it must be supplied, conditioned in
advance of entering the machine.
The connections for DI water in [C] and DI water out [D] are 1/2-inch FNPT
located at the lower rear of the machine.
A bulkhead fitting is provided to connect the system to facility plumbing. The
plumbing should be selected to provide the necessary flow and pressure for the
machine.
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