February 22, 2002 7AF Software Version 6.01 Features
STRASBAUGH CONFIDENTIAL INFORMATION
2
If you are doing tapeless backgrinding then you will need to determine adequate settings for machine variables
42, 43, 44, 46 and 51. You may also want to set machine variable 52. These variables affect how clean the back
side of the wafer will be when it comes off the work chuck. Please see the document “MACHVARS.DOC” for
a detailed description of these machine variables.
Tapeless Cleaner
After the back side of the wafer is cleaned on the work chuck the wafer is sent to the TLC (tapeless cleaner) to
clean the front side. The TLC replaces the SRD for tapeless backgrinding.
The software does not automatically detect whether you have an SRD or a TLC. You must explicitly tell the
software which unit is installed. When you install a TLC you must set machine variable 45 to 100 or 200. If you
have an SRD installed then the hundreds digit of machine variable 45 must be set to 0. Please see the document
“MACHVARS.DOC” for a more detailed description of machine variable 45.
A second setting is also required. Machine variable 93 must be set if the TLC is installed. A typical value would
be 12 to 15. This machine variable determines the minimum vacuum required to hold a wafer on the upper TLC
spin chuck.
The TLC has two chucks, an upper and a lower chuck. The lower chuck is treated the same as the old SRD spin
chuck, so machine variable 92 is be used to set the minimum vacuum required to hold a wafer on the lower TLC
chuck. You may need to increase the value in machine variable 92 because the TLC has a higher residual
vacuum level than the old SRD.
Machine variables 76, 78, and 79 are used for either the SRD or the TLC, whichever is installed. You may want
to adjust these values. In particular make sure the Spin Dry RPM (machine variable 78) is set high, typically
2500 RPM. The Spin Dry Secs (machine variable 93) should probably be about 15 seconds; more time may
mean better drying but possibly slower throughput.
Machine variables 82, 83, and 84 set timeouts for various tapeless cleaner sprays. Values for these variables may
be set to zero, or they may be set to an appropriate non-zero value by the field service engineer who installs the
tapeless cleaner. The customer should not normally need to adjust these values.
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