Operations and Maintenance Manual Table of Contents
Version 1.2 - June 2004 TOC - 7
CHAPTER 9 - MACHINE SETUP
Overview 3
Wafer Recipes Menu 5
Grinding Sequence 7
Recipe Parameter Settings and Information Available at the Wafer Recipes Menu 9
Coarse and Fine Grind Recipe Steps and Parameters 9
Wafer Parameters 12
Estimated Throughput in Wafers Per Hour 12
Example Recipes 13
Choices Available at the Wafer Recipes Menu 14
Using the Wafer Recipes Menu 16
Summary 16
Step 1 - Select the Name of the Recipe 16
Step 2 - Enter the Coarse Grind Data 17
Step 3 - Enter the Fine Grind Data 18
Step 4 - Set the Wafer Parameters 18
Step 5 - Quit and Save Changes 19
Wheel and Chuck Recipes Menu 20
Recipe Parameter Settings and Information Available at the Wheel and Chuck Recipes Menu 23
Dress and True Recipe Steps and Parameters 23
Fine Wheel Parameters 24
Grind Wheel Example Recipes 25
Work Chuck Example Recipes 26
Choices Available at the Wheel and Chuck Recipes Menu 27
Using the Wheel and Chuck Recipes Menu 29
Summary 29
Step 1 - Select the Name of the Recipe 29
Step 2 - Enter the Dress and True Recipe Data 30
Step 3 - Quit and Save Changes 32
Pre-Aligner Second Flat Sensing - OPTION 32
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