Strasbaugh nTellect (Model 7AF) Wafer Grinder
TOC - 8 Version 1.2 - June 2004
CHAPTER 10 - PREVENTIVE MAINTENANCE
SCHEDULES
Overview 3
Daily
Preventive Maintenance Schedule 4
7-Day or 5,000 Wafers
Preventive Maintenance Schedule 7
30-Day or 20,000 Wafers
Preventive Maintenance Schedule 11
180-Day or 80,000 Wafers
Preventive Maintenance Schedule 12
365-Day or 160,000 Wafers
Preventive Maintenance Schedule 14
CHAPTER 11 - MECHANICAL MAINTENANCE
PROCEDURES
Overview 4
Manual Control of Assemblies 6
Menus Used in the Mechanical Maintenance Procedures 6
Manual Movement of the Bridge with Machine Power OFF 7
Initial Alignments 8
Grinding Area 8
Summary 9
To Next Page
Loading...
