Strasbaugh nTellect 7AF - Page 12

Strasbaugh nTellect (Model 7AF) Wafer Grinder
TOC - 10 Version 1.2 - June 2004
CHAPTER 12 - SOFTWARE CALIBRATION
PROCEDURES
Overview 3
Menus Used in Maintenance and Calibration 4
Machine Maintenance Menu 4
Information Available at the Maintenance Menu 5
Choices Available at the Machine Maintenance Menu 7
Using the Machine Maintenance Menu's Manual Controls - An Example 14
Output Control / Input Status Menu 16
Information and Choices Available at the Output Control/Input Status Menu 17
Using the Output Control/Input Status Menu's Manual Controls - An Example 24
Machine (Calibration) Setup Entry Menu 26
Information and Choices Available at the Machine Setup Entry Menu 28
Using the Machine Setup Entry Menu - An Example 30
Robot (and Pre-Aligner) Setup and Calibration 32
Robot Coordinates 32
Robot (and Pre-Aligner) Commands 33
Robot / Cassette Turret Position Calibration 38
Theta 38
Radius 39
Z-Axis 40
Setting and Saving the New Coordinates 42
Work and Spin Chuck Home Index Calibration 43
Machines with Home Index Hardware Installed 44
Machines Without Home Index Hardware Installed 44