Main SP Tables-3
SM 5-129 D086/D087
System
Maintenance
3041 [Process Control Type]
001
Voltage Control *ENG
[0 or 1 / 1 / 1/step ] Alphanumeric
0: FIXED (Use the fixed values for the
charge DC bias and development DC bias
set with SP2-005 and SP2-229.)
1: CONTROL
Enables or disables potential control.
002
LD Power Control *ENG
[0 or 1 / 1 / 1/step] Alphanumeric
0: FIXED (at the value in SP2221-xxx)
1: CONTROL (adjusted by process control)
Selects the LD power control mode.
003
AutoControl Prohibition
Set
*ENG
[0 or 1 / 0 / -]
0: Permit, 1: Forbid
Enables or disables the automatic process control prohibition.
004
Pre-ACC *ENG
[0 to 2 / 2 / 1/step]
0: Not Executed
1: Process Control
2: TC Control (TD Adjustment)
3: Not used
Selects the process control mode that is done before ACC.
005
Pattern Calculation
Method
*ENG
[0 to 2 / 2 / 1/step]
0: FIXED
1: INITIALIZED
2: CALCULATED
Selects the process control method.
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