Strasbaugh nTellect (Model 7AF) Wafer Grinder
TOC - 2 Version 1.2 - June 2004
CHAPTER 2 - INSTALLATION
Overview 3
Step 1 - Unpacking/Inspection 4
Preparation for Installation 5
Step 2 - Machine Placement 6
For Manufacturing Locations with a Wide Access Door 7
(70 Inches or Greater) 7
For Manufacturing Locations with a Narrow Access Door 8
(Greater than 50 Inches but Less than 70 Inches) 8
Step 3 - Leveling the Two Machine Sections 9
Summary 9
A. Grinding Area Cabinet Base Leveling Procedure 10
Leveling Feet 10
Leveling Procedure 10
B. Handling Area Cabinet Base Leveling Procedure 16
Leveling Casters 16
Leveling Procedure 16
Step 4 - Utility Requirements 20
Step 5 - Connecting Utilities to External Sources 21
Electrical 23
Clean Dry Air 24
Vacuum 24
Vacuum Clean Dry Air 25
De-Ionized Water 25
Industrial Waste 26
Exhaust 26
Air Bearing Spindle Motor Cooling Water In/Out 26
Step 6 - Initial alignments - Completing the Installation 27
Initial Adjustments - Grinding Area 27
Initial Adjustments - Handling Area 28
Robot Software Calibration Procedures 28