00 and larger 00 Not executed
Factory default setting(SP
default)
10and larger
Result (Normal)
11 Succeeded -
20 and larger
ID Sensor
21 ID Sensor Vsg adjust error
Out of range from
Vsg=4.0±x.x[V/step]
22 ID Sensor LED Adjust error Ifsg>Max
23
ID Sensor Output error (Positive
reflect)
Vsg_reg<Min(Max)
24
ID Sensor output error (Diffusion
reflect)
Vsg_dif<Min(Max)
25
ID Sensor offset Voltage error
(Positive reflect)
Voffset_reg>Max
26
ID Sensor offset Voltage error
(Diffusion reflect)
Voffset_dif>Max
Process Control
1221
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