Calculations and Judgments Using Inspection Item Data
332
FQ2-S/CH User’s Manual
2Edge position comp.
(FQ2-S1/S2/S3/S4/CH)
Judgement JG
−2: No judgement (not measured)
0: Judgement is OK
−1: Judgement is NG
−2
Scroll X DX −99999.9999 to 99999.9999 0
Scroll Y DY −99999.9999 to 99999.9999 0
Edge0 position X X0 −99999.9999 to 99999.9999 0
Edge0 position Y Y0 −99999.9999 to 99999.9999 0
Edge1 position X X1 −99999.9999 to 99999.9999 0
Edge1 position Y Y1 −99999.9999 to 99999.9999 0
Edge0 ref. position X
(edge 0 reference position X)
SX0 −99999.9999 to 99999.9999 0
Edge0 ref. position Y
(edge 0 reference position Y)
SY0 −99999.9999 to 99999.9999 0
Edge1 ref. position X
(edge 1 reference position X)
SX1 −99999.9999 to 99999.9999 0
Edge1 ref. position Y
(edge 1 reference position Y)
SY1 −99999.9999 to 99999.9999 0
2Edge midpoint comp.
(FQ2-S1/S2/S3/S4/CH)
Judgement JG
−2: No judgement (not measured)
0: Judgement is OK
−1: Judgement is NG
−2
Scroll X DX −99999.9999 to 99999.9999 0
Scroll Y DY −99999.9999 to 99999.9999 0
Edge0 position X X0 −99999.9999 to 99999.9999 0
Edge0 position Y Y0 −99999.9999 to 99999.9999 0
Edge1 position X X1 −99999.9999 to 99999.9999 0
Edge1 position Y Y1 −99999.9999 to 99999.9999 0
Midpoint X MX −99999.9999 to 99999.9999 0
Midpoint Y MY −99999.9999 to 99999.9999 0
Edge0 ref. position X
(edge 0 reference position X)
SX0 −99999.9999 to 99999.9999 0
Edge0 ref. position Y
(edge 0 reference position Y)
SY0 −99999.9999 to 99999.9999 0
Edge1 ref. position X
(edge 1 reference position X)
SX1 −99999.9999 to 99999.9999 0
Edge1 ref. position Y
(edge 1 reference position Y)
SY1 −99999.9999 to 99999.9999 0
Ref. midpoint X
(reference midpoint X)
SMX −99999.9999 to 99999.9999 0
Ref. midpoint Y
(reference midpoint Y)
SMY −99999.9999 to 99999.9999 0
Inspection item Data name Expression
text string
Data range Default