SP3-XXX (Process)
D0CA/D0C9/D0C8/D0CB 3-142 SM Appendices
SP No. Large Category Small Category ENG
or
CTL
[Min to
Max/Init./Step]
0.0001%/step]
3-251-10
3
Dot Coverage: Display Accumulate: Average: A: M ENG
*
[0.0000 to 100.0000 /
5.0000 /
0.0001%/step]
3-251-10
4
Dot Coverage: Display Accumulate: Average: A: Y ENG
*
[0.0000 to 100.0000 /
5.0000 /
0.0001%/step]
3-251-15
1
Dot Coverage: Display Accumulate: Average: Bk ENG
*
[0.00 to 100.00 / 0.00
/ 0.01%/step]
3-251-15
2
Dot Coverage: Display Accumulate: Average: C ENG
*
[0.00 to 100.00 / 0.00
/ 0.01%/step]
3-251-15
3
Dot Coverage: Display Accumulate: Average: M ENG
*
[0.00 to 100.00 / 0.00
/ 0.01%/step]
3-251-15
4
Dot Coverage: Display Accumulate: Average: Y ENG
*
[0.00 to 100.00 / 0.00
/ 0.01%/step]
3-252-00
1
Accumulate Image
Area: Display
Latest: Bk ENG
*
[0 to 65535 / 0 /
1cm^2/step]
3-252-00
2
Accumulate Image
Area: Display
Latest: C ENG
*
[0 to 65535 / 0 /
1cm^2/step]
3-252-00
3
Accumulate Image
Area: Display
Latest: M ENG
*
[0 to 65535 / 0 /
1cm^2/step]
3-252-00
4
Accumulate Image
Area: Display
Latest: Y ENG
*
[0 to 65535 / 0 /
1cm^2/step]
3-252-01
1
Accumulate Image
Area: Display
Developer: Bk ENG
*
[0 to 4294967295 / 0
/ 1cm2/step]
3-252-01
2
Accumulate Image
Area: Display
Developer: C ENG
*
[0 to 4294967295 / 0
/ 1cm2/step]
3-252-01
3
Accumulate Image
Area: Display
Developer: M ENG
*
[0 to 4294967295 / 0
/ 1cm2/step]
3-252-01
4
Accumulate Image
Area: Display
Developer: Y ENG
*
[0 to 4294967295 / 0
/ 1cm2/step]
3-260-00
1
Temperature/Humidity:
Display
Temperature: Display ENG [-5.0 to 45.0 / 0.0 /
0.1deg/step]
3-260-00
2
Temperature/Humidity:
Display
Relative Humidity: Display ENG [0.0 to 100.0 / 0.0 /
0.1%RH/step]
3-260-00 Temperature/Humidity: Absolute Humidity: Display ENG [0.00 to 100.00 / 0.00