7. MODIFICATION OF THE MEASUREMENT CONDITIONS AND EVALUATING CONDITIONS
Over-range Setup screen
2 Touch an over-range error process appropriate for the
measurement, and touch
.
Measurement Conditions Menu screen
¾ The selected over-range speed is displayed on the
Measurement Condition Menu screen.
7.5.5 Setting the arm compensation
The arc compensation of the stylus arm can be performed. The compensation, which
allows more accurate measured profiles, is an effective way for performing counter
analysis.
NOTE
• Set the stylus-related items correctly among the environment settings before executing
arm compensation. Otherwise, calculation error may occur.
■ Operating procedure (Refer to
7.2 “■ Accessing the Evaluating Condition Menu screen”)
Home screen to Main Menu ⇒ ⇒
Measurement Conditions Menu screen
1 Touch on the Measurement Condition Menu
screen.
Touching
cycles through the available settings,
ON and OFF.
No. 99MBB765A
7-53
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