22 PRODUCT
SPECIFICATIONS
22.1 Detector
Differential inductance method
800 μm (±400 μm)/
31496.062 μin/(±15748.031 μin)
5 μm (200 μin)/[2 μm (80 μin)]
4 mN (0.4 gf)/[0.75 mN (0.075 gf)]
* [ ] indicates 0.75 mN detector (178-396).
22.2 Drive
Drive unit specifications
0.05 mm/s, 0.1 mm/s, 0.2 mm/s, 0.5 mm/s, 1 mm/s
(0.001 in/s, 0.003 in/s, 0.007 in/s, 0.019 in/s, 0.039 in/s)
0.5 mm/s, 1 mm/s, 2 mm/s, 5 mm/s
(0.019 in/s, 0.039 in/s, 0.078 in/s, 0.196 in/s)
22.3 Height/tilt adjustment unit
Height/tilt adjustment unit specifications
±1.5° (approx. 0.27°/rev)
10 mm (approx. 0.5 mm/rev)
(0.393 in (approx. 0.019 in/rev)