4.2.4 Perform leveling
The adjusting procedure with the DAT function and the visual adjusting procedure are
available for leveling the drive/detector unit.
The DAT function is a "leveling support function". Use this function to strictly level the
drive/detector unit.
If strict leveling is not required, visual adjusting procedure can be used.
■ DAT function
In a leveling operation, a fine adjustment such as a few μm up/down displacement of the
drive/detector unit may be difficult to be made visually. Therefore, the SJ-410 is provided
with the function for displaying an up or down displacement on the touch panel with a
numeric value.
An up or down displacement is displayed on the SJ-410 screen as the number of rotations of the
tilt knob on the height/tilt adjustment unit or the adjustment amount of the leveling table.
■ Tilt adjustment with the DAT function
Measurement is performed using one of the units displayed in the Pre-Meas. screen that is
selected from the Main Menu screen on the touch panel.
1 From the Home screen, navigate to Main Menu screen, and then, touch
.
The Pre-Meas. screen appears.
2 To use the height/tilt adjustment unit for adjustment, touch .
No. 99MBB765A
4-4
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