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Inficon HAPSITE Smart - The Service Module Tab in Properties Window

Inficon HAPSITE Smart
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14 - 8
IPN 074-397-P1G
HAPSITE Smart Operating Manual
14.5.1 The Service Module Tab in Properties Window
Figure 14-7 Service Module Tab in Properties Window
The following options are available:
Detach . . . . . . . . . . . . . . . . . . . . . . . Used to release the vacuum between the
Service Module and the HAPSITE before the
physical removal. (Vacuum is maintained in
the Mass Spectrometer.)
Attach . . . . . . . . . . . . . . . . . . . . . . . Used to create the vacuum between the
HAPSITE and Service Module and within the
Mass Spectrometer after physically
connecting.
Pump Down SM . . . . . . . . . . . . . . . Used to place the Service Module in storage.
Vent SM . . . . . . . . . . . . . . . . . . . . . . Used to take the Service Module out of
storage.

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