Inficon HAPSITE Smart - 15.7 NEG Pump Removal, Installation and Activation

15 - 13
IPN 074-397-P1G
HAPSITE Smart Operating Manual
15.6.1 Bakeout Procedure
A bakeout can be performed with or without the use of the Service Module. A
bakeout heats the NEG pump to 700 degrees Centigrade for a specified length of
time (usually 2 hours).
1 Click on the Service Module tab of the Properties menu.
2 Click on the Service button. See Figure 15-8.
Figure 15-8 Service Button on the Service Module Tab
3 Set the Bakeout Power to 30. The Bakeout Time is usually set to 2 hours.
Refer to Figure 15-9.
Figure 15-9 Service Window
4 Click the Bakeout button.