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Inficon HAPSITE Smart User Manual

Inficon HAPSITE Smart
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3 - 48
IPN 074-397-P1G
HAPSITE Smart Operating Manual
Figure 3-69 Column Cooling Message
6 Remove gas cans when prompted. Refer to Section 2.3.3.1, How to Change or
Remove a Gas Canister, on page 2-8 for instructions. See Figure 3-70.
Figure 3-70 System is in Extended Standby
3.10.2 Cold Standby
Cold Standby is used when the HAPSITE is attached to the Service Module. In this
state, the Ion pump is on and the NEG pump, if installed, is not powered. All heated
zones are off. Refer to Chapter 14, Service Module, for more information on the
Service Module and refer to Section 2.7.2, Placing the HAPSITE on the Service
Module, on page 2-23 for additional information on attaching the HAPSITE to the
Service Module.
1 Press the ESC button on the front panel until you reach the Main Menu.
2 Arrow down or press 5 and SEL to select the Exit Menu. See Figure 3-71.

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Inficon HAPSITE Smart Specifications

General IconGeneral
BrandInficon
ModelHAPSITE Smart
CategoryMeasuring Instruments
LanguageEnglish

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