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Inficon HAPSITE Smart - Reactivating the NEG Pump

Inficon HAPSITE Smart
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15 - 14
IPN 074-397-P1G
HAPSITE Smart Operating Manual
15.6.2 Reactivating the NEG Pump
Reactivating the NEG Pump requires having the Service Module attached to the
HAPSITE for at least 22 hours. The procedure is basically the same as activating
a new NEG pump. Refer to section 2.7, Service Module, on page 2-18 for more
information on setting up the Service Module.
1 Click on the Service Module tab of the Properties menu.
2 Click on the Service button. See Figure 15-10.
Figure 15-10 Service Button on the Service Module Tab
3 Use the Activate NEG settings below as a guideline except change HAPSITE
Pumpdown Time to 180. See Figure 15-11.

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