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Inficon HAPSITE Smart - Part 1: NEG Pump Removal

Inficon HAPSITE Smart
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15 - 17
IPN 074-397-P1G
HAPSITE Smart Operating Manual
15.7.2 Part 1: NEG Pump Removal
1 This procedure requires the use of a Service Module. The HAPSITE should be
physically on the Service Module and attached. Refer to section 2.7, Service
Module, on page 2-18 and Chapter 14, Service Module for more information on
setting up and using the Service Module.
2 If the NEG Pump is hot from recent use, let the system cool overnight before
performing this procedure. The NEG Pump should cool to below 60
o
C before
proceeding.
WARNING
Do not bypass this cool down step!
3 Vent the HAPSITE by choosing Vent HAPSITE on the Service window of the
Service Module tab in the Properties window (see Figure 15-13) or from the
Front Panel by selecting System/Service HAPSITE/Vent HAPSITE (see
Figure 15-14.) This starts an automatic process which includes monitoring the
cooling of the NEG Pump.

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