Inficon HAPSITE Smart - Part 3: Install the New NEG Pump

15 - 27
IPN 074-397-P1G
HAPSITE Smart Operating Manual
15.7.4 Part 3: Install the New NEG Pump
1 Wearing safety glasses and gloves, clean the manifold flange with methanol on
a lint free wipe. See Figure 15-22.
Figure 15-22 Cleaning Manifold Flange
2 Remove the new NEG Pump and aluminum gasket from the shipping
container. See Figure 15-23.
Figure 15-23 New NEG Pump and Aluminum Gasket