Inficon HAPSITE Smart - Page 484

15 - 26
IPN 074-397-P1G
HAPSITE Smart Operating Manual
6 Clean the o-ring on the Service Module using Methanol. See Figure 15-21.
Figure 15-21 Cleaning O-ring on the Service Module
7 Place the HAPSITE on the Service Module and lock down with the black side
latches. Refer to section 2.7.2, Placing the HAPSITE on the Service Module,
on page 2-23 for additional instructions, if needed.
8 Continue with section 15.7.4, Part 3: Install the New NEG Pump, on page
15-27.