Inficon HAPSITE Smart - Chapter 15 Maintenance; 15.1 Introduction

15 - 1
IPN 074-397-P1G
HAPSITE Smart Operating Manual
Chapter 15
Maintenance
15.1 Introduction
The HAPSITE instrument is designed to require minimal service. Repairs will
normally be carried out at the factory or other INFICON Service Facilities.
Preventive maintenance includes the cleaning of the air filters and the replacement
of certain consumables.
Additionally, the HAPSITE checks the system components each time start up is
performed, and will notify the user if the following items need to have maintenance
performed:
 Turbo Pump usage hours (Service Module)
 Roughing Pump usage hours (Service Module)
 Ion Pump usage hours (HAPSITE)
 NEG Pump usage hours (HAPSITE)
For Turbo Pump, Roughing Pump, and Ion Pump maintenance, service must be
performed by a qualified INFICON service representative. (See Chapter 17,
Customer Support.)
NEG Pump installation and removal is explained later in this section.