Inficon HAPSITE Smart - Required Tools and Equipment

15 - 16
IPN 074-397-P1G
HAPSITE Smart Operating Manual
15.7.1 Required Tools and Equipment
 A Service Module instrument
 laptop computer
 New NEG Pump.
 1/4” Allen wrench.
 Torque wrench set for 70 inch/ pounds.
 gloves (cotton or latex)
 lint free wipes
 methanol
 MicroDuster® III (containing 1,1,1,2 tetrafluoroethane)
CAUTION
Wearing safety glasses and gloves, wipe all tools with
methanol before starting this procedure.
Figure 15-12 Required Tools and Equipment