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Inficon HAPSITE Smart - Part 5: Activation of the NEG Pump

Inficon HAPSITE Smart
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15 - 38
IPN 074-397-P1G
HAPSITE Smart Operating Manual
15.7.6 Part 5: Activation of the NEG Pump
1 Click on the Service Module tab of the Properties menu.
2 Click on the Service button. See Figure 15-42.
Figure 15-42 Service Button on the Service Module Tab
3 Use the Activate NEG settings below as a guideline.
HAPSITE Pump Down Time (min) = 60
NEG Activation Power (Watts) = 30
Activation Time (min) = 480
NEG Run Temp (C) = 400
Cooldown Time (min) = 720
See Figure 15-43.

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