Inficon HAPSITE Smart - Part 2: Service Module Vacuum Interconnect (VI) Valve Cleaning

15 - 22
IPN 074-397-P1G
HAPSITE Smart Operating Manual
15.7.3 Part 2: Service Module Vacuum Interconnect (VI) Valve Cleaning
1 Remove the HAPSITE from the Service Module (see section 14.9, Physically
Removing the HAPSITE from the Service Module, on page 14-20).
2 On the underside of the Analytical Module remove the VI valve using the 1/4”
Allen wrench. See Figure 15-17.
Figure 15-17 Removing the VI Valve