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Inficon HAPSITE Smart - Page 479

Inficon HAPSITE Smart
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15 - 21
IPN 074-397-P1G
HAPSITE Smart Operating Manual
5 To loosen the chain clamp, turn the nut counter-clockwise until loose.
See Figure 15-16
Figure 15-16 Loosening Chain Clamp
6 Remove chain clamp.
7 Pull the NEG Pump out.
HINT: The aluminum gasket can not be reused. Bend the old gasket to avoid
possible reuse. Place the "USED" sticker which came with the new
NEG Pump on the old NEG Pump. Follow the instructions provided with
the new NEG Pump to return the used NEG Pump.
CAUTION
Gloves must be worn while performing all of the
following steps.
8 Continue with section 15.7.3, Part 2: Service Module Vacuum Interconnect (VI)
Valve Cleaning, on page 15-22.

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