6. CALIBRATION
No. 99MBB765A
TIP
• A step specimen has 2 μm (78.740 μin) and 10 μm (393.700 μin) steps. To obtain most
accurate values, it is recommended to use either of the steps which is the closer to a
step of a workpiece to be measured.
• Calibration values need to be changed when calibration is performed with the 2 μm
(78.740 μin) step of the step reference block.
• To install the drive unit horizontally (to set the stylus so that the level meter indicates the
center) when the step specimen is used, you must make a step between the drive unit
and the installation face of the step specimen.
2 Set the drive unit. Subsequently, perform vertical positioning and leveling to adjust
the height and angle of the drive unit.
TIP
• When a step specimen is used, determine the mutual positions of the detector and the
step specimen so that the stylus tip is parallel to the start line within the measurement
area indicated on the step specimen.
Step specimen (No. 178-611)
Set the drive unit so that the stylus tip is parallel to the start line within the measurement
area on the step specimen.
Nominal value: Step = 2 μm and 10 μm (78.740 μin and 393.700 μin) (Stamped value =
nominal value ±20%)
Accuracy of measured value: ±0.05 μm (1.968 μin) (Measured values are recorded in
the inspection report.)
• For information about vertical positioning, refer to "4.2.1 Perform the vertical
positioning" (page 4-2).
• For information about leveling, refer to "4.2.4 Perform leveling" (page 4-4).
Make a step of approx. 12 to 23 mm
(0.472 to 0.905 in) using a block etc.
unit
Height/tilt adjustment unit
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