22. PRODUCT SPECIFICATIONS
No. 99MBB765A
COB command
Command to set whether to perform calculation with B conditions
• Command
0: Not performed, 1: Performed
• Response (normal)
***: Refer to "● Error codes".
RAN Command
Command to switch the measurement range
• Command
0: AUTO, 1: 800 um (31496.062 uin), 2: 80 um (3149.606 uin), 3: 8 um (314.960 uin)
• Response (normal)
***: Refer to "● Error codes".
VLC command
Command to modify the traversing speed (May not be set depending on the conditions)
• Command
0: 0.05 mm/s (0.001 in/s), 1: 0.1 mm/s (0.003 in/s), 2: 0.2 mm/s (0.007 in/s),
3: 0.5 mm/s (0.019 in/s), 4: 1.0 mm/s (0.039 in/s)