22. PRODUCT SPECIFICATIONS
No. 99MBB765A
PSA command
Reads current detector position information.
• Command
EVA command
This comand reads evaluation data.
• Command
Number of file
data to be read
Profile specification 0: A profile, 1: B profile
Number of reading item 00: Specification of reading total number of data files, 01 - 50:
Specification of data file number to be read
1) 00: Specification of reading all items
• Response
*****: Total number of data files
2) 01 - 50: Specification of data file number to be read
• Response
** (2 digits); ********* (9 digits);
********* (9 digits); ---
Number of data file to be read; evaluation data unit [um]; evaluation data unit [um] ---
After reading all the data files, number of data file to be read is replied as "0.0".
(Note) To read the evaluation data, make sure to read all the data file at first time.