05/2014
6-124
DC SC2020
6.3.13 NVM 752_Process Control 1 List
Version 1.1
General
752-873 Correction Vdeve Upper Limit_PS_Upper Limit Value
[K][PS0]
420 0 1023 PS individual Correction Vdeve Upper Limit_Upper Limit Value - O O
752-874 Correction Vdeve Upper Limit_PS_Upper Limit Value
[K][PS1]
420 0 1023 PS individual Correction Vdeve Upper Limit_Upper Limit Value - O O
752-875 Correction CF Lower Limit_Lower Limit Value [YMC] 100 1 1023 Correction CF Lower Limit_Lower Limit Value - O O
752-876 Correction CF Lower Limit_Lower Limit Value [K] 100 1 1023 Correction CF Lower Limit_Lower Limit Value - O O
752-877 Correction CF Lower Limit_Upper Limit Value [YMC] 120 1 1023 Correction CF Lower Limit_Upper Limit Value - O O
752-878 Correction CF Lower Limit_Upper Limit Value [K] 120 1 1023 Correction CF Lower Limit_Upper Limit Value - O O
752-879 Correction CF Upper Limit_Lower Limit Value [YMC] 100 1 1023 Correction CF Upper Limit_Lower Limit Value - O O
752-880 Correction CF Upper Limit_Lower Limit Value [K] 100 1 1023 Correction CF Upper Limit_Lower Limit Value - O O
752-881 Correction CF Upper Limit_Upper Limit Value[YMC] 120 1 1023 Correction CF Upper Limit_Upper Limit Value - O O
752-882 Correction CF Upper Limit_Upper Limit Value 120 1 1023 Correction CF Upper Limit_Upper Limit Value - O O
752-883 Ghost supported DeltaV[YMC] 0 0 255 Ghost supported DeltaV Offset Value - O O
752-884 Ghost supported DeltaV[K] 0 0 255 Ghost supported DeltaV Offset Value - O O
752-885 VH Set Point[YMC] 1023 0 1023 Ghost Supported VH Set Point - O O
752-886 VH Set Point[K] 1023 0 1023 Ghost Supported VH Set Point - O O
752-887 Delta VHVB Correction Amount [Y] 0 0 255 Delta VHVB Correction Amount - O O
752-888 Delta VHVB Correction Amount [M] 0 0 255 Delta VHVB Correction Amount - O O
752-889 Delta VHVB Correction Amount [C] 0 0 255 Delta VHVB Correction Amount - O O
752-890 Delta VHVB Correction Amount [K] 0 0 255 Delta VHVB Correction Amount - O O
752-891 BCR Altitude Offset [Y] 0 -1024 1023 BCR Altitude Offset Value - O O
752-892 BCR Altitude Offset [M] 0 -1024 1023 BCR Altitude Offset Value - O O
752-893 BCR Altitude Offset[C] 0 -1024 1023 BCR Altitude Offset Value - O O
752-894 BCR Altitude Offset [K] 0 -1024 1023 BCR Altitude Offset Value - O O
752-895 BCR Altitude Coefficient [Y] 1024 0 2047 BCR Altitude Coefficient - O O
752-896 BCR Altitude Coefficient [M] 1024 0 2047 BCR Altitude Coefficient - O O
752-897 BCR Altitude Coefficient [C] 1024 0 2047 BCR Altitude Coefficient - O O
752-898 BCR Altitude Coefficient [K] 1024 0 2047 BCR Altitude Coefficient - O O
752-899 Delta LPH Environment Correction PR Correction
Amount [Y]
0 0 255 Film Thickness Correction of Environment Correction Amount - O O
752-900 Delta LPH Environment Correction PR Correction
Amount [M]
0 0 255 Film Thickness Correction of Environment Correction Amount - O O
752-901 Delta LPH Environment Correction PR Correction
Amount [C]
0 0 255 Film Thickness Correction of Environment Correction Amount - O O
752-902 Delta LPH Environment Correction PR Correction
Amount [K]
0 0 255 Film Thickness Correction of Environment Correction Amount - O O
752-903 Delta LPH Environment Correction Amount [YMC] 0 -1024 1023 Delta LPH Environment Correction Amount - O O
752-904 Delta LPH Environment Correction Amount [K] 0 -1024 1023 Delta LPH Environment Correction Amount - O O
Table 1 NVM 752_Process Control 1 List
Chain-Link NVM Name
Default
Value
Minimum
value
Maximum
value Description Unit
Write
Allowed/
Protected
Can be
initialized